Semiconductor Ceramic Processing Capabilities
Typical processing technologies and achievable accuracy for semiconductor ceramic components.
| Processing Technology | Parameter | Achievable Accuracy |
|---|---|---|
| Milling | Flatness, Parallelism, Ra |
Ra ≥ 0.05 μm Flatness < 1 μm |
| Grinding | Flatness | 5 μm (< Ø200 mm) / 10 μm (> Ø200 mm) |
| Grinding | Roughness | Ra 0.15–0.6 μm |
| Grinding | Parallelism | 5 μm (< Ø200 mm) / 10 μm (> Ø200 mm) |
| Eroding | Symmetrical | Max. 0.05 mm (hole / positioning slot) |
| Polishing | Flatness, Parallelism, Roughness |
Ra 0.06–0.35 μm Flatness < 2 μm Parallelism < 2 μm |
| Structuring | Roughness |
Roughness < 3.2 μm Size < 150 μm |


